1/2/2013	9:59:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2013	9:59:25 AM	Recipe started at 9:59 AM
1/2/2013	9:59:25 AM	Helium valve closed
1/2/2013	9:59:25 AM	H2 valve closed
1/2/2013	9:59:25 AM	BCl3 valve closed
1/2/2013	9:59:25 AM	PH3 valve closed
1/2/2013	9:59:25 AM	SiCl4 pre valve closed
1/2/2013	9:59:25 AM	SiCl4 post valve closed
1/2/2013	9:59:25 AM	Main Vac valve closed
1/2/2013	9:59:25 AM	Bypass valve closed
1/2/2013	9:59:25 AM	Bubbler valve closed
1/2/2013	9:59:25 AM	Helium MFC set to  0.000000
1/2/2013	9:59:25 AM	H2 MFC set to  0.000000
1/2/2013	9:59:25 AM	BCl3 MFC set to  0.000000
1/2/2013	9:59:25 AM	PH3 MFC set to  0.000000
1/2/2013	9:59:25 AM	SiCl4 MFC set to  0.000000
1/2/2013	9:59:25 AM	Bypass solenoid MFC set to  0.000000
1/2/2013	9:59:25 AM	Tube furnace set to 0
1/2/2013	9:59:28 AM	H2 valve closed
1/2/2013	9:59:28 AM	BCl3 valve closed
1/2/2013	9:59:28 AM	PH3 valve closed
1/2/2013	9:59:28 AM	SiCl4 pre valve closed
1/2/2013	9:59:28 AM	SiCl4 post valve closed
1/2/2013	9:59:28 AM	Main Vac valve closed
1/2/2013	9:59:28 AM	Bypass valve closed
1/2/2013	9:59:28 AM	Bubbler valve closed
1/2/2013	9:59:28 AM	Helium valve opened
1/2/2013	9:59:28 AM	Helium MFC set to  500.000000
1/2/2013	9:59:28 AM	H2 MFC set to  0.000000
1/2/2013	9:59:28 AM	BCl3 MFC set to  0.000000
1/2/2013	9:59:28 AM	PH3 MFC set to  0.000000
1/2/2013	9:59:28 AM	SiCl4 MFC set to  0.000000
1/2/2013	9:59:28 AM	Bypass solenoid MFC set to  0.000000
1/2/2013	9:59:28 AM	Tube furnace set to 0
1/2/2013	10:00:41 AM	Helium valve closed
1/2/2013	10:00:41 AM	H2 valve closed
1/2/2013	10:00:41 AM	BCl3 valve closed
1/2/2013	10:00:41 AM	PH3 valve closed
1/2/2013	10:00:41 AM	SiCl4 pre valve closed
1/2/2013	10:00:41 AM	SiCl4 post valve closed
1/2/2013	10:00:41 AM	Main Vac valve closed
1/2/2013	10:00:41 AM	Bypass valve closed
1/2/2013	10:00:41 AM	Bubbler valve closed
1/2/2013	10:00:41 AM	Helium MFC set to  0.000000
1/2/2013	10:00:41 AM	H2 MFC set to  0.000000
1/2/2013	10:00:41 AM	BCl3 MFC set to  0.000000
1/2/2013	10:00:41 AM	PH3 MFC set to  0.000000
1/2/2013	10:00:41 AM	SiCl4 MFC set to  0.000000
1/2/2013	10:00:41 AM	Bypass solenoid MFC set to  0.000000
1/2/2013	10:00:41 AM	Tube furnace set to 0
1/2/2013	10:00:42 AM	Run finished at 10:00 AM
1/2/2013	10:00:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2013	10:09:51 AM	Tube furnace set to 150
1/2/2013	10:09:52 AM	Bypass valve opened
1/2/2013	10:13:50 AM	Main Vac valve opened
1/2/2013	10:13:51 AM	Bypass valve closed
1/2/2013	10:15:12 AM	Program exited cleanly
1/2/2013	4:03:37 PM	Helium valve closed
1/2/2013	4:03:37 PM	H2 valve closed
1/2/2013	4:03:37 PM	BCl3 valve closed
1/2/2013	4:03:37 PM	PH3 valve closed
1/2/2013	4:03:37 PM	SiCl4 pre valve closed
1/2/2013	4:03:37 PM	SiCl4 post valve closed
1/2/2013	4:03:37 PM	Main Vac valve closed
1/2/2013	4:03:37 PM	Bypass valve closed
1/2/2013	4:03:37 PM	Bubbler valve closed
1/2/2013	4:03:37 PM	Helium MFC set to  0.000000
1/2/2013	4:03:37 PM	H2 MFC set to  0.000000
1/2/2013	4:03:37 PM	BCl3 MFC set to  0.000000
1/2/2013	4:03:38 PM	PH3 MFC set to  0.000000
1/2/2013	4:03:38 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:03:38 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	4:03:38 PM	Tube furnace set to 0
1/2/2013	4:03:41 PM	Main Vac valve opened
1/2/2013	4:04:07 PM	Main Vac valve closed
1/2/2013	4:04:09 PM	Main Vac valve opened
1/2/2013	4:04:11 PM	Program exited cleanly
1/2/2013	4:05:34 PM	Helium valve closed
1/2/2013	4:05:34 PM	H2 valve closed
1/2/2013	4:05:34 PM	BCl3 valve closed
1/2/2013	4:05:34 PM	PH3 valve closed
1/2/2013	4:05:34 PM	SiCl4 pre valve closed
1/2/2013	4:05:34 PM	SiCl4 post valve closed
1/2/2013	4:05:34 PM	Main Vac valve closed
1/2/2013	4:05:34 PM	Bypass valve closed
1/2/2013	4:05:34 PM	Bubbler valve closed
1/2/2013	4:05:34 PM	Helium MFC set to  0.000000
1/2/2013	4:05:34 PM	H2 MFC set to  0.000000
1/2/2013	4:05:34 PM	BCl3 MFC set to  0.000000
1/2/2013	4:05:34 PM	PH3 MFC set to  0.000000
1/2/2013	4:05:34 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:05:34 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	4:05:34 PM	Tube furnace set to 0
1/2/2013	4:05:34 PM	Main Vac valve opened
1/2/2013	4:05:49 PM	Main Vac valve closed
1/2/2013	4:05:55 PM	Main Vac valve opened
1/2/2013	4:06:34 PM	Program exited cleanly
1/2/2013	4:12:50 PM	Helium valve closed
1/2/2013	4:12:50 PM	H2 valve closed
1/2/2013	4:12:50 PM	BCl3 valve closed
1/2/2013	4:12:50 PM	PH3 valve closed
1/2/2013	4:12:50 PM	SiCl4 pre valve closed
1/2/2013	4:12:50 PM	SiCl4 post valve closed
1/2/2013	4:12:51 PM	Main Vac valve closed
1/2/2013	4:12:51 PM	Bypass valve closed
1/2/2013	4:12:51 PM	Bubbler valve closed
1/2/2013	4:12:51 PM	Helium MFC set to  0.000000
1/2/2013	4:12:51 PM	H2 MFC set to  0.000000
1/2/2013	4:12:51 PM	BCl3 MFC set to  0.000000
1/2/2013	4:12:51 PM	PH3 MFC set to  0.000000
1/2/2013	4:12:51 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:12:51 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	4:12:51 PM	Tube furnace set to 0
1/2/2013	4:12:53 PM	Main Vac valve opened
1/2/2013	4:14:20 PM	Recipe started at 4:14 PM
1/2/2013	4:14:20 PM	Helium valve closed
1/2/2013	4:14:20 PM	H2 valve closed
1/2/2013	4:14:20 PM	BCl3 valve closed
1/2/2013	4:14:20 PM	PH3 valve closed
1/2/2013	4:14:20 PM	SiCl4 pre valve closed
1/2/2013	4:14:20 PM	SiCl4 post valve closed
1/2/2013	4:14:20 PM	Bypass valve closed
1/2/2013	4:14:20 PM	Bubbler valve closed
1/2/2013	4:14:20 PM	Main Vac valve opened
1/2/2013	4:14:20 PM	Helium MFC set to  0.000000
1/2/2013	4:14:20 PM	H2 MFC set to  0.000000
1/2/2013	4:14:20 PM	BCl3 MFC set to  0.000000
1/2/2013	4:14:20 PM	PH3 MFC set to  0.000000
1/2/2013	4:14:20 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:14:20 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:14:20 PM	Tube furnace set to 0
1/2/2013	4:14:30 PM	Helium valve closed
1/2/2013	4:14:30 PM	H2 valve closed
1/2/2013	4:14:31 PM	BCl3 valve closed
1/2/2013	4:14:31 PM	PH3 valve closed
1/2/2013	4:14:31 PM	SiCl4 pre valve closed
1/2/2013	4:14:31 PM	SiCl4 post valve closed
1/2/2013	4:14:31 PM	Bypass valve closed
1/2/2013	4:14:31 PM	Bubbler valve closed
1/2/2013	4:14:31 PM	Main Vac valve opened
1/2/2013	4:14:31 PM	Helium MFC set to  0.000000
1/2/2013	4:14:31 PM	H2 MFC set to  0.000000
1/2/2013	4:14:31 PM	BCl3 MFC set to  0.000000
1/2/2013	4:14:31 PM	PH3 MFC set to  0.000000
1/2/2013	4:14:31 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:14:31 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:14:31 PM	Tube furnace set to 0
1/2/2013	4:14:36 PM	Run finished at 4:14 PM
1/2/2013	4:15:18 PM	Recipe started at 4:15 PM
1/2/2013	4:15:18 PM	Helium valve closed
1/2/2013	4:15:18 PM	H2 valve closed
1/2/2013	4:15:18 PM	BCl3 valve closed
1/2/2013	4:15:18 PM	PH3 valve closed
1/2/2013	4:15:18 PM	SiCl4 pre valve closed
1/2/2013	4:15:18 PM	SiCl4 post valve closed
1/2/2013	4:15:18 PM	Main Vac valve closed
1/2/2013	4:15:18 PM	Bypass valve closed
1/2/2013	4:15:18 PM	Bubbler valve closed
1/2/2013	4:15:18 PM	Helium MFC set to  0.000000
1/2/2013	4:15:18 PM	H2 MFC set to  0.000000
1/2/2013	4:15:18 PM	BCl3 MFC set to  0.000000
1/2/2013	4:15:18 PM	PH3 MFC set to  0.000000
1/2/2013	4:15:18 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:15:18 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:15:18 PM	Tube furnace set to 0
1/2/2013	4:15:28 PM	Helium valve closed
1/2/2013	4:15:28 PM	H2 valve closed
1/2/2013	4:15:28 PM	BCl3 valve closed
1/2/2013	4:15:28 PM	PH3 valve closed
1/2/2013	4:15:29 PM	SiCl4 pre valve closed
1/2/2013	4:15:29 PM	SiCl4 post valve closed
1/2/2013	4:15:29 PM	Bypass valve closed
1/2/2013	4:15:29 PM	Bubbler valve closed
1/2/2013	4:15:29 PM	Main Vac valve opened
1/2/2013	4:15:29 PM	Helium MFC set to  0.000000
1/2/2013	4:15:29 PM	H2 MFC set to  0.000000
1/2/2013	4:15:29 PM	BCl3 MFC set to  0.000000
1/2/2013	4:15:29 PM	PH3 MFC set to  0.000000
1/2/2013	4:15:29 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:15:29 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:15:29 PM	Tube furnace set to 0
1/2/2013	4:15:34 PM	Run finished at 4:15 PM
1/2/2013	4:15:38 PM	Recipe started at 4:15 PM
1/2/2013	4:15:38 PM	Helium valve closed
1/2/2013	4:15:38 PM	H2 valve closed
1/2/2013	4:15:38 PM	BCl3 valve closed
1/2/2013	4:15:38 PM	PH3 valve closed
1/2/2013	4:15:38 PM	SiCl4 pre valve closed
1/2/2013	4:15:38 PM	SiCl4 post valve closed
1/2/2013	4:15:38 PM	Bypass valve closed
1/2/2013	4:15:38 PM	Bubbler valve closed
1/2/2013	4:15:38 PM	Main Vac valve opened
1/2/2013	4:15:38 PM	Helium MFC set to  0.000000
1/2/2013	4:15:38 PM	H2 MFC set to  0.000000
1/2/2013	4:15:38 PM	BCl3 MFC set to  0.000000
1/2/2013	4:15:38 PM	PH3 MFC set to  0.000000
1/2/2013	4:15:38 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:15:38 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:15:38 PM	Tube furnace set to 0
1/2/2013	4:15:51 PM	Helium valve closed
1/2/2013	4:15:51 PM	H2 valve closed
1/2/2013	4:15:51 PM	BCl3 valve closed
1/2/2013	4:15:51 PM	PH3 valve closed
1/2/2013	4:15:51 PM	SiCl4 pre valve closed
1/2/2013	4:15:51 PM	SiCl4 post valve closed
1/2/2013	4:15:51 PM	Main Vac valve closed
1/2/2013	4:15:51 PM	Bypass valve closed
1/2/2013	4:15:51 PM	Bubbler valve closed
1/2/2013	4:15:51 PM	Helium MFC set to  0.000000
1/2/2013	4:15:51 PM	H2 MFC set to  0.000000
1/2/2013	4:15:51 PM	BCl3 MFC set to  0.000000
1/2/2013	4:15:51 PM	PH3 MFC set to  0.000000
1/2/2013	4:15:52 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:15:52 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:15:52 PM	Tube furnace set to 0
1/2/2013	4:15:53 PM	Run finished at 4:15 PM
1/2/2013	4:15:57 PM	Main Vac valve opened
1/2/2013	4:16:56 PM	Recipe started at 4:16 PM
1/2/2013	4:16:56 PM	Helium valve closed
1/2/2013	4:16:56 PM	H2 valve closed
1/2/2013	4:16:56 PM	BCl3 valve closed
1/2/2013	4:16:56 PM	PH3 valve closed
1/2/2013	4:16:56 PM	SiCl4 pre valve closed
1/2/2013	4:16:56 PM	SiCl4 post valve closed
1/2/2013	4:16:56 PM	Bypass valve closed
1/2/2013	4:16:56 PM	Bubbler valve closed
1/2/2013	4:16:56 PM	Main Vac valve opened
1/2/2013	4:16:56 PM	Helium MFC set to  0.000000
1/2/2013	4:16:56 PM	H2 MFC set to  0.000000
1/2/2013	4:16:56 PM	BCl3 MFC set to  0.000000
1/2/2013	4:16:56 PM	PH3 MFC set to  0.000000
1/2/2013	4:16:56 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:16:56 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:16:56 PM	Tube furnace set to 150
1/2/2013	4:17:03 PM	Run aborted at 4:17 PM
1/2/2013	4:17:03 PM	Helium valve closed
1/2/2013	4:17:03 PM	H2 valve closed
1/2/2013	4:17:03 PM	BCl3 valve closed
1/2/2013	4:17:03 PM	PH3 valve closed
1/2/2013	4:17:03 PM	SiCl4 pre valve closed
1/2/2013	4:17:03 PM	SiCl4 post valve closed
1/2/2013	4:17:03 PM	Bypass valve closed
1/2/2013	4:17:03 PM	Main Vac valve closed
1/2/2013	4:17:03 PM	Bubbler valve closed
1/2/2013	4:17:03 PM	Helium MFC set to  0.000000
1/2/2013	4:17:03 PM	H2 MFC set to  0.000000
1/2/2013	4:17:03 PM	BCl3 MFC set to  0.000000
1/2/2013	4:17:03 PM	PH3 MFC set to  0.000000
1/2/2013	4:17:03 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:17:03 PM	Tube furnace set to 0
1/2/2013	4:17:07 PM	Main Vac valve opened
1/2/2013	4:17:09 PM	Program exited cleanly
1/2/2013	4:44:20 PM	Helium valve closed
1/2/2013	4:44:20 PM	H2 valve closed
1/2/2013	4:44:20 PM	BCl3 valve closed
1/2/2013	4:44:20 PM	PH3 valve closed
1/2/2013	4:44:20 PM	SiCl4 pre valve closed
1/2/2013	4:44:20 PM	SiCl4 post valve closed
1/2/2013	4:44:20 PM	Main Vac valve closed
1/2/2013	4:44:20 PM	Bypass valve closed
1/2/2013	4:44:20 PM	Bubbler valve closed
1/2/2013	4:44:20 PM	Helium MFC set to  0.000000
1/2/2013	4:44:20 PM	H2 MFC set to  0.000000
1/2/2013	4:44:20 PM	BCl3 MFC set to  0.000000
1/2/2013	4:44:20 PM	PH3 MFC set to  0.000000
1/2/2013	4:44:20 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:44:21 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	4:44:21 PM	Tube furnace set to 0
1/2/2013	4:44:22 PM	Main Vac valve opened
1/2/2013	4:45:25 PM	Recipe started at 4:45 PM
1/2/2013	4:45:25 PM	Helium valve closed
1/2/2013	4:45:25 PM	H2 valve closed
1/2/2013	4:45:25 PM	BCl3 valve closed
1/2/2013	4:45:25 PM	PH3 valve closed
1/2/2013	4:45:25 PM	SiCl4 pre valve closed
1/2/2013	4:45:25 PM	SiCl4 post valve closed
1/2/2013	4:45:25 PM	Bypass valve closed
1/2/2013	4:45:25 PM	Bubbler valve closed
1/2/2013	4:45:25 PM	Main Vac valve opened
1/2/2013	4:45:25 PM	Helium MFC set to  0.000000
1/2/2013	4:45:25 PM	H2 MFC set to  0.000000
1/2/2013	4:45:25 PM	BCl3 MFC set to  0.000000
1/2/2013	4:45:25 PM	PH3 MFC set to  0.000000
1/2/2013	4:45:25 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:45:25 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:45:25 PM	Tube furnace set to 150
1/2/2013	4:45:30 PM	H2 valve closed
1/2/2013	4:45:30 PM	BCl3 valve closed
1/2/2013	4:45:30 PM	PH3 valve closed
1/2/2013	4:45:30 PM	SiCl4 pre valve closed
1/2/2013	4:45:30 PM	SiCl4 post valve closed
1/2/2013	4:45:30 PM	Bypass valve closed
1/2/2013	4:45:30 PM	Bubbler valve closed
1/2/2013	4:45:30 PM	Helium valve opened
1/2/2013	4:45:30 PM	Main Vac valve opened
1/2/2013	4:45:30 PM	Helium MFC set to  20.000000
1/2/2013	4:45:30 PM	H2 MFC set to  0.000000
1/2/2013	4:45:30 PM	BCl3 MFC set to  0.000000
1/2/2013	4:45:30 PM	PH3 MFC set to  0.000000
1/2/2013	4:45:30 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:45:30 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:45:30 PM	Tube furnace set to 150
1/2/2013	4:45:44 PM	Helium valve closed
1/2/2013	4:45:44 PM	H2 valve closed
1/2/2013	4:45:44 PM	BCl3 valve closed
1/2/2013	4:45:44 PM	PH3 valve closed
1/2/2013	4:45:44 PM	SiCl4 pre valve closed
1/2/2013	4:45:44 PM	SiCl4 post valve closed
1/2/2013	4:45:44 PM	Bypass valve closed
1/2/2013	4:45:44 PM	Bubbler valve closed
1/2/2013	4:45:44 PM	Main Vac valve opened
1/2/2013	4:45:44 PM	Helium MFC set to  0.000000
1/2/2013	4:45:44 PM	H2 MFC set to  0.000000
1/2/2013	4:45:44 PM	BCl3 MFC set to  0.000000
1/2/2013	4:45:44 PM	PH3 MFC set to  0.000000
1/2/2013	4:45:44 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:45:44 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:45:45 PM	Tube furnace set to 150
1/2/2013	4:46:03 PM	H2 valve closed
1/2/2013	4:46:03 PM	BCl3 valve closed
1/2/2013	4:46:03 PM	PH3 valve closed
1/2/2013	4:46:03 PM	SiCl4 pre valve closed
1/2/2013	4:46:03 PM	SiCl4 post valve closed
1/2/2013	4:46:03 PM	Bypass valve closed
1/2/2013	4:46:03 PM	Bubbler valve closed
1/2/2013	4:46:03 PM	Helium valve opened
1/2/2013	4:46:03 PM	Main Vac valve opened
1/2/2013	4:46:03 PM	Helium MFC set to  20.000000
1/2/2013	4:46:03 PM	H2 MFC set to  0.000000
1/2/2013	4:46:03 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:03 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:03 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:03 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:04 PM	Tube furnace set to 150
1/2/2013	4:46:12 PM	Helium valve closed
1/2/2013	4:46:12 PM	H2 valve closed
1/2/2013	4:46:12 PM	BCl3 valve closed
1/2/2013	4:46:12 PM	PH3 valve closed
1/2/2013	4:46:12 PM	SiCl4 pre valve closed
1/2/2013	4:46:12 PM	SiCl4 post valve closed
1/2/2013	4:46:12 PM	Bypass valve closed
1/2/2013	4:46:12 PM	Bubbler valve closed
1/2/2013	4:46:12 PM	Main Vac valve opened
1/2/2013	4:46:12 PM	Helium MFC set to  0.000000
1/2/2013	4:46:12 PM	H2 MFC set to  0.000000
1/2/2013	4:46:12 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:12 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:12 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:12 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:12 PM	Tube furnace set to 150
1/2/2013	4:46:18 PM	H2 valve closed
1/2/2013	4:46:18 PM	BCl3 valve closed
1/2/2013	4:46:18 PM	PH3 valve closed
1/2/2013	4:46:18 PM	SiCl4 pre valve closed
1/2/2013	4:46:18 PM	SiCl4 post valve closed
1/2/2013	4:46:18 PM	Bypass valve closed
1/2/2013	4:46:18 PM	Bubbler valve closed
1/2/2013	4:46:18 PM	Helium valve opened
1/2/2013	4:46:18 PM	Main Vac valve opened
1/2/2013	4:46:18 PM	Helium MFC set to  20.000000
1/2/2013	4:46:18 PM	H2 MFC set to  0.000000
1/2/2013	4:46:18 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:18 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:18 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:18 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:18 PM	Tube furnace set to 150
1/2/2013	4:46:26 PM	Helium valve closed
1/2/2013	4:46:26 PM	H2 valve closed
1/2/2013	4:46:26 PM	BCl3 valve closed
1/2/2013	4:46:26 PM	PH3 valve closed
1/2/2013	4:46:26 PM	SiCl4 pre valve closed
1/2/2013	4:46:26 PM	SiCl4 post valve closed
1/2/2013	4:46:26 PM	Bypass valve closed
1/2/2013	4:46:26 PM	Bubbler valve closed
1/2/2013	4:46:26 PM	Main Vac valve opened
1/2/2013	4:46:26 PM	Helium MFC set to  0.000000
1/2/2013	4:46:26 PM	H2 MFC set to  0.000000
1/2/2013	4:46:26 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:26 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:26 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:26 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:26 PM	Tube furnace set to 150
1/2/2013	4:46:27 PM	H2 valve closed
1/2/2013	4:46:27 PM	BCl3 valve closed
1/2/2013	4:46:27 PM	PH3 valve closed
1/2/2013	4:46:27 PM	SiCl4 pre valve closed
1/2/2013	4:46:27 PM	SiCl4 post valve closed
1/2/2013	4:46:27 PM	Bypass valve closed
1/2/2013	4:46:27 PM	Bubbler valve closed
1/2/2013	4:46:27 PM	Helium valve opened
1/2/2013	4:46:27 PM	Main Vac valve opened
1/2/2013	4:46:27 PM	Helium MFC set to  20.000000
1/2/2013	4:46:27 PM	H2 MFC set to  0.000000
1/2/2013	4:46:27 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:27 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:27 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:27 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:28 PM	Tube furnace set to 150
1/2/2013	4:46:29 PM	Helium valve closed
1/2/2013	4:46:29 PM	H2 valve closed
1/2/2013	4:46:29 PM	BCl3 valve closed
1/2/2013	4:46:29 PM	PH3 valve closed
1/2/2013	4:46:29 PM	SiCl4 pre valve closed
1/2/2013	4:46:29 PM	SiCl4 post valve closed
1/2/2013	4:46:29 PM	Bypass valve closed
1/2/2013	4:46:29 PM	Bubbler valve closed
1/2/2013	4:46:29 PM	Main Vac valve opened
1/2/2013	4:46:29 PM	Helium MFC set to  0.000000
1/2/2013	4:46:29 PM	H2 MFC set to  0.000000
1/2/2013	4:46:29 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:29 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:29 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:29 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:29 PM	Tube furnace set to 150
1/2/2013	4:46:30 PM	H2 valve closed
1/2/2013	4:46:30 PM	BCl3 valve closed
1/2/2013	4:46:30 PM	PH3 valve closed
1/2/2013	4:46:30 PM	SiCl4 pre valve closed
1/2/2013	4:46:30 PM	SiCl4 post valve closed
1/2/2013	4:46:30 PM	Bypass valve closed
1/2/2013	4:46:30 PM	Bubbler valve closed
1/2/2013	4:46:30 PM	Helium valve opened
1/2/2013	4:46:30 PM	Main Vac valve opened
1/2/2013	4:46:30 PM	Helium MFC set to  20.000000
1/2/2013	4:46:30 PM	H2 MFC set to  0.000000
1/2/2013	4:46:30 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:30 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:30 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:30 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:30 PM	Tube furnace set to 150
1/2/2013	4:46:31 PM	Helium valve closed
1/2/2013	4:46:31 PM	H2 valve closed
1/2/2013	4:46:31 PM	BCl3 valve closed
1/2/2013	4:46:31 PM	PH3 valve closed
1/2/2013	4:46:31 PM	SiCl4 pre valve closed
1/2/2013	4:46:31 PM	SiCl4 post valve closed
1/2/2013	4:46:31 PM	Bypass valve closed
1/2/2013	4:46:31 PM	Bubbler valve closed
1/2/2013	4:46:31 PM	Main Vac valve opened
1/2/2013	4:46:31 PM	Helium MFC set to  0.000000
1/2/2013	4:46:31 PM	H2 MFC set to  0.000000
1/2/2013	4:46:31 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:31 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:31 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:31 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:32 PM	Tube furnace set to 150
1/2/2013	4:46:34 PM	H2 valve closed
1/2/2013	4:46:34 PM	BCl3 valve closed
1/2/2013	4:46:34 PM	PH3 valve closed
1/2/2013	4:46:34 PM	SiCl4 pre valve closed
1/2/2013	4:46:34 PM	SiCl4 post valve closed
1/2/2013	4:46:34 PM	Bypass valve closed
1/2/2013	4:46:34 PM	Bubbler valve closed
1/2/2013	4:46:34 PM	Helium valve opened
1/2/2013	4:46:34 PM	Main Vac valve opened
1/2/2013	4:46:34 PM	Helium MFC set to  20.000000
1/2/2013	4:46:34 PM	H2 MFC set to  0.000000
1/2/2013	4:46:34 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:34 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:34 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:34 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:35 PM	Tube furnace set to 150
1/2/2013	4:46:36 PM	Helium valve closed
1/2/2013	4:46:36 PM	H2 valve closed
1/2/2013	4:46:36 PM	BCl3 valve closed
1/2/2013	4:46:36 PM	PH3 valve closed
1/2/2013	4:46:36 PM	SiCl4 pre valve closed
1/2/2013	4:46:36 PM	SiCl4 post valve closed
1/2/2013	4:46:36 PM	Bypass valve closed
1/2/2013	4:46:36 PM	Bubbler valve closed
1/2/2013	4:46:36 PM	Main Vac valve opened
1/2/2013	4:46:36 PM	Helium MFC set to  0.000000
1/2/2013	4:46:36 PM	H2 MFC set to  0.000000
1/2/2013	4:46:36 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:36 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:36 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:36 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:36 PM	Tube furnace set to 150
1/2/2013	4:46:37 PM	H2 valve closed
1/2/2013	4:46:37 PM	BCl3 valve closed
1/2/2013	4:46:37 PM	PH3 valve closed
1/2/2013	4:46:37 PM	SiCl4 pre valve closed
1/2/2013	4:46:37 PM	SiCl4 post valve closed
1/2/2013	4:46:37 PM	Bypass valve closed
1/2/2013	4:46:37 PM	Bubbler valve closed
1/2/2013	4:46:37 PM	Helium valve opened
1/2/2013	4:46:37 PM	Main Vac valve opened
1/2/2013	4:46:37 PM	Helium MFC set to  20.000000
1/2/2013	4:46:37 PM	H2 MFC set to  0.000000
1/2/2013	4:46:37 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:37 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:37 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:37 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:37 PM	Tube furnace set to 150
1/2/2013	4:46:38 PM	Helium valve closed
1/2/2013	4:46:38 PM	H2 valve closed
1/2/2013	4:46:38 PM	BCl3 valve closed
1/2/2013	4:46:38 PM	PH3 valve closed
1/2/2013	4:46:38 PM	SiCl4 pre valve closed
1/2/2013	4:46:38 PM	SiCl4 post valve closed
1/2/2013	4:46:38 PM	Bypass valve closed
1/2/2013	4:46:38 PM	Bubbler valve closed
1/2/2013	4:46:38 PM	Main Vac valve opened
1/2/2013	4:46:38 PM	Helium MFC set to  0.000000
1/2/2013	4:46:38 PM	H2 MFC set to  0.000000
1/2/2013	4:46:38 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:38 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:38 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:38 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:38 PM	Tube furnace set to 150
1/2/2013	4:46:39 PM	H2 valve closed
1/2/2013	4:46:39 PM	BCl3 valve closed
1/2/2013	4:46:39 PM	PH3 valve closed
1/2/2013	4:46:39 PM	SiCl4 pre valve closed
1/2/2013	4:46:39 PM	SiCl4 post valve closed
1/2/2013	4:46:39 PM	Bypass valve closed
1/2/2013	4:46:39 PM	Bubbler valve closed
1/2/2013	4:46:39 PM	Helium valve opened
1/2/2013	4:46:39 PM	Main Vac valve opened
1/2/2013	4:46:39 PM	Helium MFC set to  20.000000
1/2/2013	4:46:39 PM	H2 MFC set to  0.000000
1/2/2013	4:46:39 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:39 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:39 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:39 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:39 PM	Tube furnace set to 150
1/2/2013	4:46:40 PM	Helium valve closed
1/2/2013	4:46:40 PM	H2 valve closed
1/2/2013	4:46:40 PM	BCl3 valve closed
1/2/2013	4:46:40 PM	PH3 valve closed
1/2/2013	4:46:40 PM	SiCl4 pre valve closed
1/2/2013	4:46:40 PM	SiCl4 post valve closed
1/2/2013	4:46:40 PM	Bypass valve closed
1/2/2013	4:46:40 PM	Bubbler valve closed
1/2/2013	4:46:40 PM	Main Vac valve opened
1/2/2013	4:46:40 PM	Helium MFC set to  0.000000
1/2/2013	4:46:40 PM	H2 MFC set to  0.000000
1/2/2013	4:46:40 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:40 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:40 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:40 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:40 PM	Tube furnace set to 150
1/2/2013	4:46:43 PM	H2 valve closed
1/2/2013	4:46:43 PM	BCl3 valve closed
1/2/2013	4:46:43 PM	PH3 valve closed
1/2/2013	4:46:43 PM	SiCl4 pre valve closed
1/2/2013	4:46:43 PM	SiCl4 post valve closed
1/2/2013	4:46:43 PM	Bypass valve closed
1/2/2013	4:46:43 PM	Bubbler valve closed
1/2/2013	4:46:43 PM	Helium valve opened
1/2/2013	4:46:43 PM	Main Vac valve opened
1/2/2013	4:46:43 PM	Helium MFC set to  20.000000
1/2/2013	4:46:43 PM	H2 MFC set to  0.000000
1/2/2013	4:46:43 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:43 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:43 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:43 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:43 PM	Tube furnace set to 150
1/2/2013	4:46:44 PM	Helium valve closed
1/2/2013	4:46:44 PM	H2 valve closed
1/2/2013	4:46:44 PM	BCl3 valve closed
1/2/2013	4:46:44 PM	PH3 valve closed
1/2/2013	4:46:44 PM	SiCl4 pre valve closed
1/2/2013	4:46:44 PM	SiCl4 post valve closed
1/2/2013	4:46:44 PM	Bypass valve closed
1/2/2013	4:46:44 PM	Bubbler valve closed
1/2/2013	4:46:44 PM	Main Vac valve opened
1/2/2013	4:46:44 PM	Helium MFC set to  0.000000
1/2/2013	4:46:44 PM	H2 MFC set to  0.000000
1/2/2013	4:46:44 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:44 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:44 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:44 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:44 PM	Tube furnace set to 150
1/2/2013	4:46:47 PM	H2 valve closed
1/2/2013	4:46:47 PM	BCl3 valve closed
1/2/2013	4:46:47 PM	PH3 valve closed
1/2/2013	4:46:47 PM	SiCl4 pre valve closed
1/2/2013	4:46:47 PM	SiCl4 post valve closed
1/2/2013	4:46:47 PM	Bypass valve closed
1/2/2013	4:46:47 PM	Bubbler valve closed
1/2/2013	4:46:47 PM	Helium valve opened
1/2/2013	4:46:47 PM	Main Vac valve opened
1/2/2013	4:46:47 PM	Helium MFC set to  20.000000
1/2/2013	4:46:47 PM	H2 MFC set to  0.000000
1/2/2013	4:46:47 PM	BCl3 MFC set to  0.000000
1/2/2013	4:46:47 PM	PH3 MFC set to  0.000000
1/2/2013	4:46:47 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:46:47 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:46:47 PM	Tube furnace set to 150
1/2/2013	4:47:18 PM	Helium valve closed
1/2/2013	4:47:18 PM	H2 valve closed
1/2/2013	4:47:18 PM	BCl3 valve closed
1/2/2013	4:47:18 PM	PH3 valve closed
1/2/2013	4:47:18 PM	SiCl4 pre valve closed
1/2/2013	4:47:18 PM	SiCl4 post valve closed
1/2/2013	4:47:18 PM	Bypass valve closed
1/2/2013	4:47:18 PM	Bubbler valve closed
1/2/2013	4:47:18 PM	Main Vac valve opened
1/2/2013	4:47:18 PM	Helium MFC set to  0.000000
1/2/2013	4:47:18 PM	H2 MFC set to  0.000000
1/2/2013	4:47:18 PM	BCl3 MFC set to  0.000000
1/2/2013	4:47:18 PM	PH3 MFC set to  0.000000
1/2/2013	4:47:18 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:47:18 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:47:18 PM	Tube furnace set to 150
1/2/2013	4:47:19 PM	Run finished at 4:47 PM
1/2/2013	4:47:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2013	4:47:50 PM	Recipe started at 4:47 PM
1/2/2013	4:47:50 PM	Helium valve closed
1/2/2013	4:47:50 PM	H2 valve closed
1/2/2013	4:47:50 PM	BCl3 valve closed
1/2/2013	4:47:50 PM	PH3 valve closed
1/2/2013	4:47:50 PM	SiCl4 pre valve closed
1/2/2013	4:47:50 PM	SiCl4 post valve closed
1/2/2013	4:47:50 PM	Main Vac valve closed
1/2/2013	4:47:50 PM	Bubbler valve closed
1/2/2013	4:47:50 PM	Bypass valve opened
1/2/2013	4:47:50 PM	Helium MFC set to  0.000000
1/2/2013	4:47:50 PM	H2 MFC set to  0.000000
1/2/2013	4:47:50 PM	BCl3 MFC set to  0.000000
1/2/2013	4:47:50 PM	PH3 MFC set to  0.000000
1/2/2013	4:47:50 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:47:50 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:47:50 PM	Tube furnace set to 0
1/2/2013	4:47:50 PM	Helium valve closed
1/2/2013	4:47:50 PM	H2 valve closed
1/2/2013	4:47:50 PM	BCl3 valve closed
1/2/2013	4:47:50 PM	PH3 valve closed
1/2/2013	4:47:50 PM	SiCl4 pre valve closed
1/2/2013	4:47:50 PM	SiCl4 post valve closed
1/2/2013	4:47:50 PM	Main Vac valve closed
1/2/2013	4:47:50 PM	Bubbler valve closed
1/2/2013	4:47:50 PM	Bypass valve opened
1/2/2013	4:47:50 PM	Helium MFC set to  0.000000
1/2/2013	4:47:50 PM	H2 MFC set to  0.000000
1/2/2013	4:47:50 PM	BCl3 MFC set to  0.000000
1/2/2013	4:47:50 PM	PH3 MFC set to  0.000000
1/2/2013	4:47:50 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:47:50 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	4:47:50 PM	Tube furnace set to 0
1/2/2013	4:47:59 PM	Run aborted at 4:47 PM
1/2/2013	4:47:59 PM	Helium valve closed
1/2/2013	4:47:59 PM	H2 valve closed
1/2/2013	4:47:59 PM	BCl3 valve closed
1/2/2013	4:47:59 PM	PH3 valve closed
1/2/2013	4:47:59 PM	SiCl4 pre valve closed
1/2/2013	4:47:59 PM	SiCl4 post valve closed
1/2/2013	4:47:59 PM	Bypass valve closed
1/2/2013	4:47:59 PM	Main Vac valve closed
1/2/2013	4:47:59 PM	Bubbler valve closed
1/2/2013	4:47:59 PM	Helium MFC set to  0.000000
1/2/2013	4:47:59 PM	H2 MFC set to  0.000000
1/2/2013	4:47:59 PM	BCl3 MFC set to  0.000000
1/2/2013	4:47:59 PM	PH3 MFC set to  0.000000
1/2/2013	4:47:59 PM	SiCl4 MFC set to  0.000000
1/2/2013	4:47:59 PM	Tube furnace set to 0
1/2/2013	4:47:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2013	4:48:42 PM	Main Vac valve opened
1/2/2013	5:05:50 PM	Program exited cleanly
1/2/2013	5:08:05 PM	Helium valve closed
1/2/2013	5:08:05 PM	H2 valve closed
1/2/2013	5:08:05 PM	BCl3 valve closed
1/2/2013	5:08:05 PM	PH3 valve closed
1/2/2013	5:08:05 PM	SiCl4 pre valve closed
1/2/2013	5:08:05 PM	SiCl4 post valve closed
1/2/2013	5:08:05 PM	Main Vac valve closed
1/2/2013	5:08:05 PM	Bypass valve closed
1/2/2013	5:08:05 PM	Bubbler valve closed
1/2/2013	5:08:06 PM	Helium MFC set to  0.000000
1/2/2013	5:08:06 PM	H2 MFC set to  0.000000
1/2/2013	5:08:06 PM	BCl3 MFC set to  0.000000
1/2/2013	5:08:06 PM	PH3 MFC set to  0.000000
1/2/2013	5:08:06 PM	SiCl4 MFC set to  0.000000
1/2/2013	5:08:06 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	5:08:06 PM	Tube furnace set to 0
1/2/2013	5:08:08 PM	Main Vac valve opened
1/2/2013	5:08:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2013	5:08:15 PM	Recipe started at 5:08 PM
1/2/2013	5:08:15 PM	Helium valve closed
1/2/2013	5:08:15 PM	H2 valve closed
1/2/2013	5:08:15 PM	BCl3 valve closed
1/2/2013	5:08:15 PM	PH3 valve closed
1/2/2013	5:08:15 PM	SiCl4 pre valve closed
1/2/2013	5:08:15 PM	SiCl4 post valve closed
1/2/2013	5:08:15 PM	Main Vac valve closed
1/2/2013	5:08:15 PM	Bubbler valve closed
1/2/2013	5:08:15 PM	Bypass valve opened
1/2/2013	5:08:15 PM	Helium MFC set to  0.000000
1/2/2013	5:08:15 PM	H2 MFC set to  0.000000
1/2/2013	5:08:15 PM	BCl3 MFC set to  0.000000
1/2/2013	5:08:15 PM	PH3 MFC set to  0.000000
1/2/2013	5:08:15 PM	SiCl4 MFC set to  0.000000
1/2/2013	5:08:15 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	5:08:15 PM	Tube furnace set to 0
1/2/2013	5:08:16 PM	Helium valve closed
1/2/2013	5:08:16 PM	H2 valve closed
1/2/2013	5:08:16 PM	BCl3 valve closed
1/2/2013	5:08:16 PM	PH3 valve closed
1/2/2013	5:08:16 PM	SiCl4 pre valve closed
1/2/2013	5:08:16 PM	SiCl4 post valve closed
1/2/2013	5:08:16 PM	Main Vac valve closed
1/2/2013	5:08:16 PM	Bubbler valve closed
1/2/2013	5:08:16 PM	Bypass valve opened
1/2/2013	5:08:16 PM	Helium MFC set to  0.000000
1/2/2013	5:08:16 PM	H2 MFC set to  0.000000
1/2/2013	5:08:16 PM	BCl3 MFC set to  0.000000
1/2/2013	5:08:16 PM	PH3 MFC set to  0.000000
1/2/2013	5:08:16 PM	SiCl4 MFC set to  0.000000
1/2/2013	5:08:16 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	5:08:16 PM	Tube furnace set to 0
1/2/2013	5:08:21 PM	Helium valve closed
1/2/2013	5:08:21 PM	H2 valve closed
1/2/2013	5:08:21 PM	BCl3 valve closed
1/2/2013	5:08:21 PM	PH3 valve closed
1/2/2013	5:08:21 PM	SiCl4 pre valve closed
1/2/2013	5:08:21 PM	SiCl4 post valve closed
1/2/2013	5:08:21 PM	Bypass valve closed
1/2/2013	5:08:21 PM	Bubbler valve closed
1/2/2013	5:08:21 PM	Main Vac valve opened
1/2/2013	5:08:21 PM	Helium MFC set to  0.000000
1/2/2013	5:08:21 PM	H2 MFC set to  0.000000
1/2/2013	5:08:21 PM	BCl3 MFC set to  0.000000
1/2/2013	5:08:21 PM	PH3 MFC set to  0.000000
1/2/2013	5:08:21 PM	SiCl4 MFC set to  0.000000
1/2/2013	5:08:21 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	5:08:21 PM	Tube furnace set to 0
1/2/2013	5:08:22 PM	Run finished at 5:08 PM
1/2/2013	5:08:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2013	5:08:43 PM	Program exited cleanly
1/2/2013	7:33:26 PM	Helium valve closed
1/2/2013	7:33:26 PM	H2 valve closed
1/2/2013	7:33:26 PM	BCl3 valve closed
1/2/2013	7:33:26 PM	PH3 valve closed
1/2/2013	7:33:26 PM	SiCl4 pre valve closed
1/2/2013	7:33:26 PM	SiCl4 post valve closed
1/2/2013	7:33:26 PM	Main Vac valve closed
1/2/2013	7:33:26 PM	Bypass valve closed
1/2/2013	7:33:26 PM	Bubbler valve closed
1/2/2013	7:33:26 PM	Helium MFC set to  0.000000
1/2/2013	7:33:26 PM	H2 MFC set to  0.000000
1/2/2013	7:33:26 PM	BCl3 MFC set to  0.000000
1/2/2013	7:33:26 PM	PH3 MFC set to  0.000000
1/2/2013	7:33:26 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:33:26 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	7:33:26 PM	Tube furnace set to 0
1/2/2013	7:33:31 PM	Program exited cleanly
1/2/2013	7:33:33 PM	Helium valve closed
1/2/2013	7:33:33 PM	H2 valve closed
1/2/2013	7:33:33 PM	BCl3 valve closed
1/2/2013	7:33:33 PM	PH3 valve closed
1/2/2013	7:33:33 PM	SiCl4 pre valve closed
1/2/2013	7:33:33 PM	SiCl4 post valve closed
1/2/2013	7:33:33 PM	Main Vac valve closed
1/2/2013	7:33:33 PM	Bypass valve closed
1/2/2013	7:33:33 PM	Bubbler valve closed
1/2/2013	7:33:33 PM	Helium MFC set to  0.000000
1/2/2013	7:33:33 PM	H2 MFC set to  0.000000
1/2/2013	7:33:33 PM	BCl3 MFC set to  0.000000
1/2/2013	7:33:33 PM	PH3 MFC set to  0.000000
1/2/2013	7:33:33 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:33:33 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	7:33:33 PM	Tube furnace set to 0
1/2/2013	7:33:34 PM	Main Vac valve opened
1/2/2013	7:34:24 PM	Program exited cleanly
1/2/2013	7:34:26 PM	Helium valve closed
1/2/2013	7:34:26 PM	H2 valve closed
1/2/2013	7:34:26 PM	BCl3 valve closed
1/2/2013	7:34:26 PM	PH3 valve closed
1/2/2013	7:34:26 PM	SiCl4 pre valve closed
1/2/2013	7:34:26 PM	SiCl4 post valve closed
1/2/2013	7:34:26 PM	Main Vac valve closed
1/2/2013	7:34:26 PM	Bypass valve closed
1/2/2013	7:34:26 PM	Bubbler valve closed
1/2/2013	7:34:26 PM	Helium MFC set to  0.000000
1/2/2013	7:34:26 PM	H2 MFC set to  0.000000
1/2/2013	7:34:26 PM	BCl3 MFC set to  0.000000
1/2/2013	7:34:26 PM	PH3 MFC set to  0.000000
1/2/2013	7:34:26 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:34:26 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	7:34:26 PM	Tube furnace set to 0
1/2/2013	7:34:31 PM	Main Vac valve opened
1/2/2013	7:34:33 PM	Program exited cleanly
1/2/2013	7:34:52 PM	Helium valve closed
1/2/2013	7:34:52 PM	H2 valve closed
1/2/2013	7:34:52 PM	BCl3 valve closed
1/2/2013	7:34:52 PM	PH3 valve closed
1/2/2013	7:34:52 PM	SiCl4 pre valve closed
1/2/2013	7:34:52 PM	SiCl4 post valve closed
1/2/2013	7:34:52 PM	Main Vac valve closed
1/2/2013	7:34:52 PM	Bypass valve closed
1/2/2013	7:34:52 PM	Bubbler valve closed
1/2/2013	7:34:52 PM	Helium MFC set to  0.000000
1/2/2013	7:34:52 PM	H2 MFC set to  0.000000
1/2/2013	7:34:52 PM	BCl3 MFC set to  0.000000
1/2/2013	7:34:52 PM	PH3 MFC set to  0.000000
1/2/2013	7:34:52 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:34:52 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	7:34:52 PM	Tube furnace set to 0
1/2/2013	7:34:53 PM	Main Vac valve opened
1/2/2013	7:36:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2013	7:36:40 PM	Recipe started at 7:36 PM
1/2/2013	7:36:40 PM	Helium valve closed
1/2/2013	7:36:40 PM	H2 valve closed
1/2/2013	7:36:40 PM	BCl3 valve closed
1/2/2013	7:36:40 PM	PH3 valve closed
1/2/2013	7:36:40 PM	SiCl4 pre valve closed
1/2/2013	7:36:40 PM	SiCl4 post valve closed
1/2/2013	7:36:40 PM	Main Vac valve closed
1/2/2013	7:36:40 PM	Bypass valve closed
1/2/2013	7:36:40 PM	Bubbler valve closed
1/2/2013	7:36:40 PM	Helium MFC set to  0.000000
1/2/2013	7:36:40 PM	H2 MFC set to  0.000000
1/2/2013	7:36:40 PM	BCl3 MFC set to  0.000000
1/2/2013	7:36:40 PM	PH3 MFC set to  0.000000
1/2/2013	7:36:40 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:36:40 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	7:36:40 PM	Tube furnace set to 0
1/2/2013	7:36:43 PM	H2 valve closed
1/2/2013	7:36:43 PM	BCl3 valve closed
1/2/2013	7:36:43 PM	PH3 valve closed
1/2/2013	7:36:43 PM	SiCl4 pre valve closed
1/2/2013	7:36:43 PM	SiCl4 post valve closed
1/2/2013	7:36:43 PM	Main Vac valve closed
1/2/2013	7:36:43 PM	Bypass valve closed
1/2/2013	7:36:43 PM	Bubbler valve closed
1/2/2013	7:36:43 PM	Helium valve opened
1/2/2013	7:36:43 PM	Helium MFC set to  500.000000
1/2/2013	7:36:43 PM	H2 MFC set to  0.000000
1/2/2013	7:36:43 PM	BCl3 MFC set to  0.000000
1/2/2013	7:36:43 PM	PH3 MFC set to  0.000000
1/2/2013	7:36:43 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:36:43 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	7:36:43 PM	Tube furnace set to 0
1/2/2013	7:36:48 PM	Run aborted at 7:36 PM
1/2/2013	7:36:48 PM	Helium valve closed
1/2/2013	7:36:48 PM	H2 valve closed
1/2/2013	7:36:48 PM	BCl3 valve closed
1/2/2013	7:36:48 PM	PH3 valve closed
1/2/2013	7:36:48 PM	SiCl4 pre valve closed
1/2/2013	7:36:48 PM	SiCl4 post valve closed
1/2/2013	7:36:48 PM	Bypass valve closed
1/2/2013	7:36:48 PM	Main Vac valve closed
1/2/2013	7:36:48 PM	Bubbler valve closed
1/2/2013	7:36:48 PM	Helium MFC set to  0.000000
1/2/2013	7:36:48 PM	H2 MFC set to  0.000000
1/2/2013	7:36:48 PM	BCl3 MFC set to  0.000000
1/2/2013	7:36:48 PM	PH3 MFC set to  0.000000
1/2/2013	7:36:48 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:36:48 PM	Tube furnace set to 0
1/2/2013	7:36:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2013	7:37:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2013	7:37:12 PM	Recipe started at 7:37 PM
1/2/2013	7:37:12 PM	Helium valve closed
1/2/2013	7:37:12 PM	H2 valve closed
1/2/2013	7:37:12 PM	BCl3 valve closed
1/2/2013	7:37:12 PM	PH3 valve closed
1/2/2013	7:37:12 PM	SiCl4 pre valve closed
1/2/2013	7:37:12 PM	SiCl4 post valve closed
1/2/2013	7:37:12 PM	Main Vac valve closed
1/2/2013	7:37:12 PM	Bypass valve closed
1/2/2013	7:37:12 PM	Bubbler valve closed
1/2/2013	7:37:12 PM	Helium MFC set to  0.000000
1/2/2013	7:37:12 PM	H2 MFC set to  0.000000
1/2/2013	7:37:12 PM	BCl3 MFC set to  0.000000
1/2/2013	7:37:13 PM	PH3 MFC set to  0.000000
1/2/2013	7:37:13 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:37:13 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	7:37:13 PM	Tube furnace set to 0
1/2/2013	7:37:15 PM	Run aborted at 7:37 PM
1/2/2013	7:37:15 PM	Helium valve closed
1/2/2013	7:37:15 PM	H2 valve closed
1/2/2013	7:37:15 PM	BCl3 valve closed
1/2/2013	7:37:15 PM	PH3 valve closed
1/2/2013	7:37:15 PM	SiCl4 pre valve closed
1/2/2013	7:37:15 PM	SiCl4 post valve closed
1/2/2013	7:37:15 PM	Bypass valve closed
1/2/2013	7:37:15 PM	Main Vac valve closed
1/2/2013	7:37:15 PM	Bubbler valve closed
1/2/2013	7:37:15 PM	Helium MFC set to  0.000000
1/2/2013	7:37:15 PM	H2 MFC set to  0.000000
1/2/2013	7:37:15 PM	BCl3 MFC set to  0.000000
1/2/2013	7:37:15 PM	PH3 MFC set to  0.000000
1/2/2013	7:37:15 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:37:15 PM	Tube furnace set to 0
1/2/2013	7:37:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2013	7:37:18 PM	Main Vac valve opened
1/2/2013	7:37:19 PM	Main Vac valve closed
1/2/2013	7:37:22 PM	Bypass valve opened
1/2/2013	7:37:37 PM	Main Vac valve opened
1/2/2013	7:37:38 PM	Bypass valve closed
1/2/2013	7:38:23 PM	Program exited cleanly
1/2/2013	7:38:33 PM	Helium valve closed
1/2/2013	7:38:33 PM	H2 valve closed
1/2/2013	7:38:33 PM	BCl3 valve closed
1/2/2013	7:38:33 PM	PH3 valve closed
1/2/2013	7:38:33 PM	SiCl4 pre valve closed
1/2/2013	7:38:33 PM	SiCl4 post valve closed
1/2/2013	7:38:33 PM	Main Vac valve closed
1/2/2013	7:38:33 PM	Bypass valve closed
1/2/2013	7:38:33 PM	Bubbler valve closed
1/2/2013	7:38:33 PM	Helium MFC set to  0.000000
1/2/2013	7:38:33 PM	H2 MFC set to  0.000000
1/2/2013	7:38:33 PM	BCl3 MFC set to  0.000000
1/2/2013	7:38:33 PM	PH3 MFC set to  0.000000
1/2/2013	7:38:33 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:38:33 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	7:38:34 PM	Tube furnace set to 0
1/2/2013	7:38:37 PM	Main Vac valve opened
1/2/2013	7:38:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2013	7:38:45 PM	Recipe started at 7:38 PM
1/2/2013	7:38:46 PM	Helium valve closed
1/2/2013	7:38:46 PM	H2 valve closed
1/2/2013	7:38:46 PM	BCl3 valve closed
1/2/2013	7:38:46 PM	PH3 valve closed
1/2/2013	7:38:46 PM	SiCl4 pre valve closed
1/2/2013	7:38:46 PM	SiCl4 post valve closed
1/2/2013	7:38:46 PM	Main Vac valve closed
1/2/2013	7:38:46 PM	Bypass valve closed
1/2/2013	7:38:46 PM	Bubbler valve closed
1/2/2013	7:38:46 PM	Helium MFC set to  0.000000
1/2/2013	7:38:46 PM	H2 MFC set to  0.000000
1/2/2013	7:38:46 PM	BCl3 MFC set to  0.000000
1/2/2013	7:38:46 PM	PH3 MFC set to  0.000000
1/2/2013	7:38:46 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:38:46 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	7:38:46 PM	Tube furnace set to 0
1/2/2013	7:38:49 PM	H2 valve closed
1/2/2013	7:38:49 PM	BCl3 valve closed
1/2/2013	7:38:49 PM	PH3 valve closed
1/2/2013	7:38:49 PM	SiCl4 pre valve closed
1/2/2013	7:38:49 PM	SiCl4 post valve closed
1/2/2013	7:38:49 PM	Main Vac valve closed
1/2/2013	7:38:49 PM	Bypass valve closed
1/2/2013	7:38:49 PM	Bubbler valve closed
1/2/2013	7:38:49 PM	Helium valve opened
1/2/2013	7:38:49 PM	Helium MFC set to  500.000000
1/2/2013	7:38:49 PM	H2 MFC set to  0.000000
1/2/2013	7:38:49 PM	BCl3 MFC set to  0.000000
1/2/2013	7:38:49 PM	PH3 MFC set to  0.000000
1/2/2013	7:38:49 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:38:49 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	7:38:49 PM	Tube furnace set to 0
1/2/2013	7:38:55 PM	Run aborted at 7:38 PM
1/2/2013	7:38:55 PM	Helium valve closed
1/2/2013	7:38:55 PM	H2 valve closed
1/2/2013	7:38:55 PM	BCl3 valve closed
1/2/2013	7:38:55 PM	PH3 valve closed
1/2/2013	7:38:55 PM	SiCl4 pre valve closed
1/2/2013	7:38:55 PM	SiCl4 post valve closed
1/2/2013	7:38:55 PM	Bypass valve closed
1/2/2013	7:38:55 PM	Main Vac valve closed
1/2/2013	7:38:55 PM	Bubbler valve closed
1/2/2013	7:38:55 PM	Helium MFC set to  0.000000
1/2/2013	7:38:55 PM	H2 MFC set to  0.000000
1/2/2013	7:38:55 PM	BCl3 MFC set to  0.000000
1/2/2013	7:38:55 PM	PH3 MFC set to  0.000000
1/2/2013	7:38:55 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:38:56 PM	Tube furnace set to 0
1/2/2013	7:38:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2013	7:38:58 PM	Bypass valve opened
1/2/2013	7:39:52 PM	Main Vac valve opened
1/2/2013	7:39:53 PM	Bypass valve closed
1/2/2013	7:40:00 PM	Program exited cleanly
1/2/2013	7:40:29 PM	Helium valve closed
1/2/2013	7:40:29 PM	H2 valve closed
1/2/2013	7:40:29 PM	BCl3 valve closed
1/2/2013	7:40:29 PM	PH3 valve closed
1/2/2013	7:40:29 PM	SiCl4 pre valve closed
1/2/2013	7:40:29 PM	SiCl4 post valve closed
1/2/2013	7:40:29 PM	Main Vac valve closed
1/2/2013	7:40:29 PM	Bypass valve closed
1/2/2013	7:40:29 PM	Bubbler valve closed
1/2/2013	7:40:29 PM	Helium MFC set to  0.000000
1/2/2013	7:40:29 PM	H2 MFC set to  0.000000
1/2/2013	7:40:29 PM	BCl3 MFC set to  0.000000
1/2/2013	7:40:29 PM	PH3 MFC set to  0.000000
1/2/2013	7:40:29 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:40:29 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	7:40:29 PM	Tube furnace set to 0
1/2/2013	7:40:31 PM	Main Vac valve opened
1/2/2013	7:41:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2013	7:41:18 PM	Recipe started at 7:41 PM
1/2/2013	7:41:18 PM	Helium valve closed
1/2/2013	7:41:18 PM	H2 valve closed
1/2/2013	7:41:18 PM	BCl3 valve closed
1/2/2013	7:41:18 PM	PH3 valve closed
1/2/2013	7:41:18 PM	SiCl4 pre valve closed
1/2/2013	7:41:18 PM	SiCl4 post valve closed
1/2/2013	7:41:18 PM	Main Vac valve closed
1/2/2013	7:41:18 PM	Bypass valve closed
1/2/2013	7:41:18 PM	Bubbler valve closed
1/2/2013	7:41:18 PM	Helium MFC set to  0.000000
1/2/2013	7:41:18 PM	H2 MFC set to  0.000000
1/2/2013	7:41:18 PM	BCl3 MFC set to  0.000000
1/2/2013	7:41:18 PM	PH3 MFC set to  0.000000
1/2/2013	7:41:18 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:41:18 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	7:41:18 PM	Tube furnace set to 0
1/2/2013	7:41:21 PM	H2 valve closed
1/2/2013	7:41:21 PM	BCl3 valve closed
1/2/2013	7:41:22 PM	PH3 valve closed
1/2/2013	7:41:22 PM	SiCl4 pre valve closed
1/2/2013	7:41:22 PM	SiCl4 post valve closed
1/2/2013	7:41:22 PM	Main Vac valve closed
1/2/2013	7:41:22 PM	Bypass valve closed
1/2/2013	7:41:22 PM	Bubbler valve closed
1/2/2013	7:41:22 PM	Helium valve opened
1/2/2013	7:41:22 PM	Helium MFC set to  500.000000
1/2/2013	7:41:22 PM	H2 MFC set to  0.000000
1/2/2013	7:41:22 PM	BCl3 MFC set to  0.000000
1/2/2013	7:41:22 PM	PH3 MFC set to  0.000000
1/2/2013	7:41:22 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:41:22 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	7:41:22 PM	Tube furnace set to 0
1/2/2013	7:41:28 PM	Run aborted at 7:41 PM
1/2/2013	7:41:28 PM	Helium valve closed
1/2/2013	7:41:28 PM	H2 valve closed
1/2/2013	7:41:28 PM	BCl3 valve closed
1/2/2013	7:41:28 PM	PH3 valve closed
1/2/2013	7:41:28 PM	SiCl4 pre valve closed
1/2/2013	7:41:28 PM	SiCl4 post valve closed
1/2/2013	7:41:28 PM	Bypass valve closed
1/2/2013	7:41:28 PM	Main Vac valve closed
1/2/2013	7:41:28 PM	Bubbler valve closed
1/2/2013	7:41:28 PM	Helium MFC set to  0.000000
1/2/2013	7:41:28 PM	H2 MFC set to  0.000000
1/2/2013	7:41:28 PM	BCl3 MFC set to  0.000000
1/2/2013	7:41:28 PM	PH3 MFC set to  0.000000
1/2/2013	7:41:28 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:41:28 PM	Tube furnace set to 0
1/2/2013	7:41:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2013	7:41:30 PM	Bypass valve opened
1/2/2013	7:42:19 PM	Main Vac valve opened
1/2/2013	7:42:19 PM	Bypass valve closed
1/2/2013	7:42:55 PM	Program exited cleanly
1/2/2013	7:50:49 PM	Helium valve closed
1/2/2013	7:50:49 PM	H2 valve closed
1/2/2013	7:50:49 PM	BCl3 valve closed
1/2/2013	7:50:49 PM	PH3 valve closed
1/2/2013	7:50:49 PM	SiCl4 pre valve closed
1/2/2013	7:50:49 PM	SiCl4 post valve closed
1/2/2013	7:50:49 PM	Main Vac valve closed
1/2/2013	7:50:49 PM	Bypass valve closed
1/2/2013	7:50:49 PM	Bubbler valve closed
1/2/2013	7:50:49 PM	Helium MFC set to  0.000000
1/2/2013	7:50:49 PM	H2 MFC set to  0.000000
1/2/2013	7:50:49 PM	BCl3 MFC set to  0.000000
1/2/2013	7:50:49 PM	PH3 MFC set to  0.000000
1/2/2013	7:50:49 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:50:49 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	7:50:49 PM	Tube furnace set to 0
1/2/2013	7:50:55 PM	Program exited cleanly
1/2/2013	7:54:58 PM	Helium valve closed
1/2/2013	7:54:58 PM	H2 valve closed
1/2/2013	7:54:58 PM	BCl3 valve closed
1/2/2013	7:54:58 PM	PH3 valve closed
1/2/2013	7:54:58 PM	SiCl4 pre valve closed
1/2/2013	7:54:58 PM	SiCl4 post valve closed
1/2/2013	7:54:58 PM	Main Vac valve closed
1/2/2013	7:54:58 PM	Bypass valve closed
1/2/2013	7:54:58 PM	Bubbler valve closed
1/2/2013	7:54:58 PM	Helium MFC set to  0.000000
1/2/2013	7:54:58 PM	H2 MFC set to  0.000000
1/2/2013	7:54:58 PM	BCl3 MFC set to  0.000000
1/2/2013	7:54:59 PM	PH3 MFC set to  0.000000
1/2/2013	7:54:59 PM	SiCl4 MFC set to  0.000000
1/2/2013	7:54:59 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	7:54:59 PM	Tube furnace set to 0
1/2/2013	7:55:46 PM	Program exited cleanly
1/2/2013	8:03:58 PM	Helium valve closed
1/2/2013	8:03:58 PM	H2 valve closed
1/2/2013	8:03:58 PM	BCl3 valve closed
1/2/2013	8:03:58 PM	PH3 valve closed
1/2/2013	8:03:58 PM	SiCl4 pre valve closed
1/2/2013	8:03:58 PM	SiCl4 post valve closed
1/2/2013	8:03:58 PM	Main Vac valve closed
1/2/2013	8:03:58 PM	Bypass valve closed
1/2/2013	8:03:58 PM	Bubbler valve closed
1/2/2013	8:03:58 PM	Helium MFC set to  0.000000
1/2/2013	8:03:58 PM	H2 MFC set to  0.000000
1/2/2013	8:03:58 PM	BCl3 MFC set to  0.000000
1/2/2013	8:03:58 PM	PH3 MFC set to  0.000000
1/2/2013	8:03:58 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:03:58 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	8:03:58 PM	Tube furnace set to 0
1/2/2013	8:04:01 PM	Main Vac valve opened
1/2/2013	8:04:10 PM	Program exited cleanly
1/2/2013	8:04:17 PM	Helium valve closed
1/2/2013	8:04:17 PM	H2 valve closed
1/2/2013	8:04:17 PM	BCl3 valve closed
1/2/2013	8:04:17 PM	PH3 valve closed
1/2/2013	8:04:17 PM	SiCl4 pre valve closed
1/2/2013	8:04:17 PM	SiCl4 post valve closed
1/2/2013	8:04:17 PM	Main Vac valve closed
1/2/2013	8:04:17 PM	Bypass valve closed
1/2/2013	8:04:17 PM	Bubbler valve closed
1/2/2013	8:04:17 PM	Helium MFC set to  0.000000
1/2/2013	8:04:17 PM	H2 MFC set to  0.000000
1/2/2013	8:04:17 PM	BCl3 MFC set to  0.000000
1/2/2013	8:04:17 PM	PH3 MFC set to  0.000000
1/2/2013	8:04:17 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:04:17 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	8:04:17 PM	Tube furnace set to 0
1/2/2013	8:04:19 PM	Main Vac valve opened
1/2/2013	8:04:51 PM	Program exited cleanly
1/2/2013	8:04:54 PM	Helium valve closed
1/2/2013	8:04:54 PM	H2 valve closed
1/2/2013	8:04:54 PM	BCl3 valve closed
1/2/2013	8:04:54 PM	PH3 valve closed
1/2/2013	8:04:54 PM	SiCl4 pre valve closed
1/2/2013	8:04:54 PM	SiCl4 post valve closed
1/2/2013	8:04:54 PM	Main Vac valve closed
1/2/2013	8:04:54 PM	Bypass valve closed
1/2/2013	8:04:54 PM	Bubbler valve closed
1/2/2013	8:04:54 PM	Helium MFC set to  0.000000
1/2/2013	8:04:54 PM	H2 MFC set to  0.000000
1/2/2013	8:04:54 PM	BCl3 MFC set to  0.000000
1/2/2013	8:04:54 PM	PH3 MFC set to  0.000000
1/2/2013	8:04:54 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:04:54 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	8:04:54 PM	Tube furnace set to 0
1/2/2013	8:04:55 PM	Main Vac valve opened
1/2/2013	8:04:57 PM	Program exited cleanly
1/2/2013	8:07:39 PM	Helium valve closed
1/2/2013	8:07:39 PM	H2 valve closed
1/2/2013	8:07:39 PM	BCl3 valve closed
1/2/2013	8:07:39 PM	PH3 valve closed
1/2/2013	8:07:39 PM	SiCl4 pre valve closed
1/2/2013	8:07:39 PM	SiCl4 post valve closed
1/2/2013	8:07:39 PM	Main Vac valve closed
1/2/2013	8:07:39 PM	Bypass valve closed
1/2/2013	8:07:39 PM	Bubbler valve closed
1/2/2013	8:07:39 PM	Helium MFC set to  0.000000
1/2/2013	8:07:39 PM	H2 MFC set to  0.000000
1/2/2013	8:07:39 PM	BCl3 MFC set to  0.000000
1/2/2013	8:07:39 PM	PH3 MFC set to  0.000000
1/2/2013	8:07:39 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:07:39 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	8:07:39 PM	Tube furnace set to 0
1/2/2013	8:07:41 PM	Main Vac valve opened
1/2/2013	8:08:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/2/2013	8:08:23 PM	Recipe started at 8:08 PM
1/2/2013	8:08:23 PM	Helium valve closed
1/2/2013	8:08:23 PM	H2 valve closed
1/2/2013	8:08:23 PM	BCl3 valve closed
1/2/2013	8:08:23 PM	PH3 valve closed
1/2/2013	8:08:23 PM	SiCl4 pre valve closed
1/2/2013	8:08:23 PM	SiCl4 post valve closed
1/2/2013	8:08:23 PM	Main Vac valve closed
1/2/2013	8:08:23 PM	Bubbler valve closed
1/2/2013	8:08:23 PM	Bypass valve opened
1/2/2013	8:08:23 PM	Helium MFC set to  0.000000
1/2/2013	8:08:23 PM	H2 MFC set to  0.000000
1/2/2013	8:08:23 PM	BCl3 MFC set to  0.000000
1/2/2013	8:08:23 PM	PH3 MFC set to  0.000000
1/2/2013	8:08:23 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:08:23 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	8:08:24 PM	Tube furnace set to 0
1/2/2013	8:08:24 PM	Helium valve closed
1/2/2013	8:08:24 PM	H2 valve closed
1/2/2013	8:08:24 PM	BCl3 valve closed
1/2/2013	8:08:24 PM	PH3 valve closed
1/2/2013	8:08:24 PM	SiCl4 pre valve closed
1/2/2013	8:08:24 PM	SiCl4 post valve closed
1/2/2013	8:08:24 PM	Main Vac valve closed
1/2/2013	8:08:24 PM	Bubbler valve closed
1/2/2013	8:08:24 PM	Bypass valve opened
1/2/2013	8:08:24 PM	Helium MFC set to  0.000000
1/2/2013	8:08:24 PM	H2 MFC set to  0.000000
1/2/2013	8:08:24 PM	BCl3 MFC set to  0.000000
1/2/2013	8:08:24 PM	PH3 MFC set to  0.000000
1/2/2013	8:08:24 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:08:24 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	8:08:24 PM	Tube furnace set to 0
1/2/2013	8:08:34 PM	Run aborted at 8:08 PM
1/2/2013	8:08:34 PM	Helium valve closed
1/2/2013	8:08:34 PM	H2 valve closed
1/2/2013	8:08:34 PM	BCl3 valve closed
1/2/2013	8:08:34 PM	PH3 valve closed
1/2/2013	8:08:34 PM	SiCl4 pre valve closed
1/2/2013	8:08:34 PM	SiCl4 post valve closed
1/2/2013	8:08:34 PM	Bypass valve closed
1/2/2013	8:08:34 PM	Main Vac valve closed
1/2/2013	8:08:34 PM	Bubbler valve closed
1/2/2013	8:08:34 PM	Helium MFC set to  0.000000
1/2/2013	8:08:34 PM	H2 MFC set to  0.000000
1/2/2013	8:08:34 PM	BCl3 MFC set to  0.000000
1/2/2013	8:08:34 PM	PH3 MFC set to  0.000000
1/2/2013	8:08:34 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:08:35 PM	Tube furnace set to 0
1/2/2013	8:08:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/2/2013	8:08:37 PM	Main Vac valve opened
1/2/2013	8:08:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2013	8:08:42 PM	Recipe started at 8:08 PM
1/2/2013	8:08:42 PM	Helium valve closed
1/2/2013	8:08:42 PM	H2 valve closed
1/2/2013	8:08:42 PM	BCl3 valve closed
1/2/2013	8:08:42 PM	PH3 valve closed
1/2/2013	8:08:42 PM	SiCl4 pre valve closed
1/2/2013	8:08:42 PM	SiCl4 post valve closed
1/2/2013	8:08:42 PM	Main Vac valve closed
1/2/2013	8:08:42 PM	Bypass valve closed
1/2/2013	8:08:42 PM	Bubbler valve closed
1/2/2013	8:08:42 PM	Helium MFC set to  0.000000
1/2/2013	8:08:42 PM	H2 MFC set to  0.000000
1/2/2013	8:08:42 PM	BCl3 MFC set to  0.000000
1/2/2013	8:08:42 PM	PH3 MFC set to  0.000000
1/2/2013	8:08:42 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:08:42 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	8:08:42 PM	Tube furnace set to 0
1/2/2013	8:08:45 PM	H2 valve closed
1/2/2013	8:08:45 PM	BCl3 valve closed
1/2/2013	8:08:45 PM	PH3 valve closed
1/2/2013	8:08:45 PM	SiCl4 pre valve closed
1/2/2013	8:08:45 PM	SiCl4 post valve closed
1/2/2013	8:08:45 PM	Main Vac valve closed
1/2/2013	8:08:45 PM	Bypass valve closed
1/2/2013	8:08:45 PM	Bubbler valve closed
1/2/2013	8:08:45 PM	Helium valve opened
1/2/2013	8:08:45 PM	Helium MFC set to  500.000000
1/2/2013	8:08:45 PM	H2 MFC set to  0.000000
1/2/2013	8:08:45 PM	BCl3 MFC set to  0.000000
1/2/2013	8:08:45 PM	PH3 MFC set to  0.000000
1/2/2013	8:08:45 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:08:45 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	8:08:46 PM	Tube furnace set to 0
1/2/2013	8:08:51 PM	Run aborted at 8:08 PM
1/2/2013	8:08:51 PM	Helium valve closed
1/2/2013	8:08:51 PM	H2 valve closed
1/2/2013	8:08:51 PM	BCl3 valve closed
1/2/2013	8:08:51 PM	PH3 valve closed
1/2/2013	8:08:51 PM	SiCl4 pre valve closed
1/2/2013	8:08:51 PM	SiCl4 post valve closed
1/2/2013	8:08:51 PM	Bypass valve closed
1/2/2013	8:08:51 PM	Main Vac valve closed
1/2/2013	8:08:51 PM	Bubbler valve closed
1/2/2013	8:08:51 PM	Helium MFC set to  0.000000
1/2/2013	8:08:51 PM	H2 MFC set to  0.000000
1/2/2013	8:08:51 PM	BCl3 MFC set to  0.000000
1/2/2013	8:08:51 PM	PH3 MFC set to  0.000000
1/2/2013	8:08:51 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:08:51 PM	Tube furnace set to 0
1/2/2013	8:08:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2013	8:08:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2013	8:08:53 PM	Recipe started at 8:08 PM
1/2/2013	8:08:53 PM	Helium valve closed
1/2/2013	8:08:53 PM	H2 valve closed
1/2/2013	8:08:53 PM	BCl3 valve closed
1/2/2013	8:08:53 PM	PH3 valve closed
1/2/2013	8:08:53 PM	SiCl4 pre valve closed
1/2/2013	8:08:53 PM	SiCl4 post valve closed
1/2/2013	8:08:53 PM	Main Vac valve closed
1/2/2013	8:08:53 PM	Bubbler valve closed
1/2/2013	8:08:53 PM	Bypass valve opened
1/2/2013	8:08:53 PM	Helium MFC set to  0.000000
1/2/2013	8:08:53 PM	H2 MFC set to  0.000000
1/2/2013	8:08:53 PM	BCl3 MFC set to  0.000000
1/2/2013	8:08:53 PM	PH3 MFC set to  0.000000
1/2/2013	8:08:53 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:08:53 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	8:08:53 PM	Tube furnace set to 0
1/2/2013	8:09:42 PM	Helium valve closed
1/2/2013	8:09:42 PM	H2 valve closed
1/2/2013	8:09:42 PM	BCl3 valve closed
1/2/2013	8:09:42 PM	PH3 valve closed
1/2/2013	8:09:42 PM	SiCl4 pre valve closed
1/2/2013	8:09:42 PM	SiCl4 post valve closed
1/2/2013	8:09:42 PM	Main Vac valve closed
1/2/2013	8:09:42 PM	Bubbler valve closed
1/2/2013	8:09:42 PM	Bypass valve opened
1/2/2013	8:09:42 PM	Helium MFC set to  0.000000
1/2/2013	8:09:42 PM	H2 MFC set to  0.000000
1/2/2013	8:09:42 PM	BCl3 MFC set to  0.000000
1/2/2013	8:09:42 PM	PH3 MFC set to  0.000000
1/2/2013	8:09:42 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:09:42 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	8:09:42 PM	Tube furnace set to 0
1/2/2013	8:09:59 PM	Helium valve closed
1/2/2013	8:09:59 PM	H2 valve closed
1/2/2013	8:09:59 PM	BCl3 valve closed
1/2/2013	8:09:59 PM	PH3 valve closed
1/2/2013	8:09:59 PM	SiCl4 pre valve closed
1/2/2013	8:09:59 PM	SiCl4 post valve closed
1/2/2013	8:09:59 PM	Bypass valve closed
1/2/2013	8:09:59 PM	Bubbler valve closed
1/2/2013	8:09:59 PM	Main Vac valve opened
1/2/2013	8:09:59 PM	Helium MFC set to  0.000000
1/2/2013	8:10:00 PM	H2 MFC set to  0.000000
1/2/2013	8:10:00 PM	BCl3 MFC set to  0.000000
1/2/2013	8:10:00 PM	PH3 MFC set to  0.000000
1/2/2013	8:10:00 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:10:00 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	8:10:00 PM	Tube furnace set to 0
1/2/2013	8:10:01 PM	Run finished at 8:10 PM
1/2/2013	8:10:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2013	8:10:14 PM	Program exited cleanly
1/2/2013	8:10:16 PM	Helium valve closed
1/2/2013	8:10:16 PM	H2 valve closed
1/2/2013	8:10:16 PM	BCl3 valve closed
1/2/2013	8:10:16 PM	PH3 valve closed
1/2/2013	8:10:16 PM	SiCl4 pre valve closed
1/2/2013	8:10:16 PM	SiCl4 post valve closed
1/2/2013	8:10:16 PM	Main Vac valve closed
1/2/2013	8:10:16 PM	Bypass valve closed
1/2/2013	8:10:16 PM	Bubbler valve closed
1/2/2013	8:10:16 PM	Helium MFC set to  0.000000
1/2/2013	8:10:16 PM	H2 MFC set to  0.000000
1/2/2013	8:10:16 PM	BCl3 MFC set to  0.000000
1/2/2013	8:10:16 PM	PH3 MFC set to  0.000000
1/2/2013	8:10:16 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:10:16 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	8:10:17 PM	Tube furnace set to 0
1/2/2013	8:10:18 PM	Main Vac valve opened
1/2/2013	8:10:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2013	8:10:20 PM	Recipe started at 8:10 PM
1/2/2013	8:10:20 PM	Helium valve closed
1/2/2013	8:10:20 PM	H2 valve closed
1/2/2013	8:10:20 PM	BCl3 valve closed
1/2/2013	8:10:20 PM	PH3 valve closed
1/2/2013	8:10:20 PM	SiCl4 pre valve closed
1/2/2013	8:10:20 PM	SiCl4 post valve closed
1/2/2013	8:10:20 PM	Main Vac valve closed
1/2/2013	8:10:20 PM	Bypass valve closed
1/2/2013	8:10:20 PM	Bubbler valve closed
1/2/2013	8:10:20 PM	Helium MFC set to  0.000000
1/2/2013	8:10:20 PM	H2 MFC set to  0.000000
1/2/2013	8:10:20 PM	BCl3 MFC set to  0.000000
1/2/2013	8:10:20 PM	PH3 MFC set to  0.000000
1/2/2013	8:10:20 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:10:20 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	8:10:20 PM	Tube furnace set to 0
1/2/2013	8:10:23 PM	H2 valve closed
1/2/2013	8:10:23 PM	BCl3 valve closed
1/2/2013	8:10:23 PM	PH3 valve closed
1/2/2013	8:10:23 PM	SiCl4 pre valve closed
1/2/2013	8:10:23 PM	SiCl4 post valve closed
1/2/2013	8:10:23 PM	Main Vac valve closed
1/2/2013	8:10:23 PM	Bypass valve closed
1/2/2013	8:10:23 PM	Bubbler valve closed
1/2/2013	8:10:23 PM	Helium valve opened
1/2/2013	8:10:23 PM	Helium MFC set to  500.000000
1/2/2013	8:10:23 PM	H2 MFC set to  0.000000
1/2/2013	8:10:23 PM	BCl3 MFC set to  0.000000
1/2/2013	8:10:23 PM	PH3 MFC set to  0.000000
1/2/2013	8:10:23 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:10:23 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	8:10:23 PM	Tube furnace set to 0
1/2/2013	8:10:25 PM	Helium valve closed
1/2/2013	8:10:25 PM	H2 valve closed
1/2/2013	8:10:25 PM	BCl3 valve closed
1/2/2013	8:10:25 PM	PH3 valve closed
1/2/2013	8:10:25 PM	SiCl4 pre valve closed
1/2/2013	8:10:25 PM	SiCl4 post valve closed
1/2/2013	8:10:25 PM	Main Vac valve closed
1/2/2013	8:10:25 PM	Bypass valve closed
1/2/2013	8:10:25 PM	Bubbler valve closed
1/2/2013	8:10:25 PM	Helium MFC set to  0.000000
1/2/2013	8:10:25 PM	H2 MFC set to  0.000000
1/2/2013	8:10:25 PM	BCl3 MFC set to  0.000000
1/2/2013	8:10:25 PM	PH3 MFC set to  0.000000
1/2/2013	8:10:25 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:10:25 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	8:10:25 PM	Tube furnace set to 0
1/2/2013	8:10:26 PM	Run finished at 8:10 PM
1/2/2013	8:10:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/2/2013	8:10:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2013	8:10:31 PM	Recipe started at 8:10 PM
1/2/2013	8:10:31 PM	Helium valve closed
1/2/2013	8:10:31 PM	H2 valve closed
1/2/2013	8:10:31 PM	BCl3 valve closed
1/2/2013	8:10:31 PM	PH3 valve closed
1/2/2013	8:10:31 PM	SiCl4 pre valve closed
1/2/2013	8:10:31 PM	SiCl4 post valve closed
1/2/2013	8:10:31 PM	Main Vac valve closed
1/2/2013	8:10:31 PM	Bubbler valve closed
1/2/2013	8:10:31 PM	Bypass valve opened
1/2/2013	8:10:31 PM	Helium MFC set to  0.000000
1/2/2013	8:10:31 PM	H2 MFC set to  0.000000
1/2/2013	8:10:31 PM	BCl3 MFC set to  0.000000
1/2/2013	8:10:31 PM	PH3 MFC set to  0.000000
1/2/2013	8:10:31 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:10:31 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	8:10:31 PM	Tube furnace set to 0
1/2/2013	8:11:05 PM	Helium valve closed
1/2/2013	8:11:05 PM	H2 valve closed
1/2/2013	8:11:05 PM	BCl3 valve closed
1/2/2013	8:11:05 PM	PH3 valve closed
1/2/2013	8:11:05 PM	SiCl4 pre valve closed
1/2/2013	8:11:05 PM	SiCl4 post valve closed
1/2/2013	8:11:05 PM	Main Vac valve closed
1/2/2013	8:11:05 PM	Bubbler valve closed
1/2/2013	8:11:05 PM	Bypass valve opened
1/2/2013	8:11:05 PM	Helium MFC set to  0.000000
1/2/2013	8:11:05 PM	H2 MFC set to  0.000000
1/2/2013	8:11:05 PM	BCl3 MFC set to  0.000000
1/2/2013	8:11:05 PM	PH3 MFC set to  0.000000
1/2/2013	8:11:05 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:11:05 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	8:11:05 PM	Tube furnace set to 0
1/2/2013	8:11:12 PM	Helium valve closed
1/2/2013	8:11:12 PM	H2 valve closed
1/2/2013	8:11:12 PM	BCl3 valve closed
1/2/2013	8:11:12 PM	PH3 valve closed
1/2/2013	8:11:12 PM	SiCl4 pre valve closed
1/2/2013	8:11:12 PM	SiCl4 post valve closed
1/2/2013	8:11:12 PM	Bypass valve closed
1/2/2013	8:11:12 PM	Bubbler valve closed
1/2/2013	8:11:12 PM	Main Vac valve opened
1/2/2013	8:11:12 PM	Helium MFC set to  0.000000
1/2/2013	8:11:12 PM	H2 MFC set to  0.000000
1/2/2013	8:11:12 PM	BCl3 MFC set to  0.000000
1/2/2013	8:11:12 PM	PH3 MFC set to  0.000000
1/2/2013	8:11:12 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:11:12 PM	Bypass solenoid MFC set to  0.000000
1/2/2013	8:11:13 PM	Tube furnace set to 0
1/2/2013	8:11:14 PM	Run finished at 8:11 PM
1/2/2013	8:11:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/2/2013	8:17:07 PM	Program exited cleanly
1/2/2013	8:24:25 PM	Helium valve closed
1/2/2013	8:24:25 PM	H2 valve closed
1/2/2013	8:24:25 PM	BCl3 valve closed
1/2/2013	8:24:25 PM	PH3 valve closed
1/2/2013	8:24:25 PM	SiCl4 pre valve closed
1/2/2013	8:24:25 PM	SiCl4 post valve closed
1/2/2013	8:24:25 PM	Main Vac valve closed
1/2/2013	8:24:25 PM	Bypass valve closed
1/2/2013	8:24:25 PM	Bubbler valve closed
1/2/2013	8:24:25 PM	Helium MFC set to  0.000000
1/2/2013	8:24:25 PM	H2 MFC set to  0.000000
1/2/2013	8:24:25 PM	BCl3 MFC set to  0.000000
1/2/2013	8:24:25 PM	PH3 MFC set to  0.000000
1/2/2013	8:24:25 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:24:25 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	8:24:25 PM	Tube furnace set to 0
1/2/2013	8:26:29 PM	Helium valve closed
1/2/2013	8:26:29 PM	H2 valve closed
1/2/2013	8:26:29 PM	BCl3 valve closed
1/2/2013	8:26:29 PM	PH3 valve closed
1/2/2013	8:26:29 PM	SiCl4 pre valve closed
1/2/2013	8:26:29 PM	SiCl4 post valve closed
1/2/2013	8:26:29 PM	Main Vac valve closed
1/2/2013	8:26:29 PM	Bypass valve closed
1/2/2013	8:26:29 PM	Bubbler valve closed
1/2/2013	8:26:29 PM	Helium MFC set to  0.000000
1/2/2013	8:26:29 PM	H2 MFC set to  0.000000
1/2/2013	8:26:29 PM	BCl3 MFC set to  0.000000
1/2/2013	8:26:29 PM	PH3 MFC set to  0.000000
1/2/2013	8:26:29 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:26:29 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	8:26:29 PM	Tube furnace set to 0
1/2/2013	8:26:35 PM	Main Vac valve opened
1/2/2013	8:29:24 PM	Helium valve closed
1/2/2013	8:29:24 PM	H2 valve closed
1/2/2013	8:29:24 PM	BCl3 valve closed
1/2/2013	8:29:24 PM	PH3 valve closed
1/2/2013	8:29:24 PM	SiCl4 pre valve closed
1/2/2013	8:29:24 PM	SiCl4 post valve closed
1/2/2013	8:29:24 PM	Main Vac valve closed
1/2/2013	8:29:24 PM	Bypass valve closed
1/2/2013	8:29:24 PM	Bubbler valve closed
1/2/2013	8:29:24 PM	Helium MFC set to  0.000000
1/2/2013	8:29:24 PM	H2 MFC set to  0.000000
1/2/2013	8:29:24 PM	BCl3 MFC set to  0.000000
1/2/2013	8:29:24 PM	PH3 MFC set to  0.000000
1/2/2013	8:29:24 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:29:24 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	8:29:24 PM	Tube furnace set to 0
1/2/2013	8:33:28 PM	Helium valve closed
1/2/2013	8:33:28 PM	H2 valve closed
1/2/2013	8:33:28 PM	BCl3 valve closed
1/2/2013	8:33:28 PM	PH3 valve closed
1/2/2013	8:33:28 PM	SiCl4 pre valve closed
1/2/2013	8:33:28 PM	SiCl4 post valve closed
1/2/2013	8:33:28 PM	Main Vac valve closed
1/2/2013	8:33:28 PM	Bypass valve closed
1/2/2013	8:33:28 PM	Bubbler valve closed
1/2/2013	8:33:28 PM	Helium MFC set to  0.000000
1/2/2013	8:33:28 PM	H2 MFC set to  0.000000
1/2/2013	8:33:28 PM	BCl3 MFC set to  0.000000
1/2/2013	8:33:28 PM	PH3 MFC set to  0.000000
1/2/2013	8:33:28 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:33:28 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	8:33:28 PM	Tube furnace set to 0
1/2/2013	8:34:34 PM	Main Vac valve opened
1/2/2013	8:34:38 PM	Program exited cleanly
1/2/2013	8:35:10 PM	Helium valve closed
1/2/2013	8:35:10 PM	H2 valve closed
1/2/2013	8:35:10 PM	BCl3 valve closed
1/2/2013	8:35:10 PM	PH3 valve closed
1/2/2013	8:35:10 PM	SiCl4 pre valve closed
1/2/2013	8:35:10 PM	SiCl4 post valve closed
1/2/2013	8:35:10 PM	Main Vac valve closed
1/2/2013	8:35:10 PM	Bypass valve closed
1/2/2013	8:35:10 PM	Bubbler valve closed
1/2/2013	8:35:10 PM	Helium MFC set to  0.000000
1/2/2013	8:35:10 PM	H2 MFC set to  0.000000
1/2/2013	8:35:10 PM	BCl3 MFC set to  0.000000
1/2/2013	8:35:10 PM	PH3 MFC set to  0.000000
1/2/2013	8:35:10 PM	SiCl4 MFC set to  0.000000
1/2/2013	8:35:10 PM	Bypass solenoid MFC set to  760.000000
1/2/2013	8:35:10 PM	Tube furnace set to 0
1/2/2013	8:35:12 PM	Main Vac valve opened
1/2/2013	8:35:15 PM	Tube furnace set to 150
